Low heat loss and small contact area composite electrode for a phase change media memory device
US6746892B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2003 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Aug 8, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N70/8828
Abstract
A low heat loss and small contact area electrode structure for a phase change media memory device is disclosed. The memory device includes a composite electrode that includes a dielectric mandrel that is connected with a substrate and having a tapered shape that terminates at a vertex. An electrically conductive material conformally covers the dielectric mandrel and terminates at a tip. A first dielectric layer covers all of the composite electrode except an exposed portion of the composite electrode that is adjacent to the tip. A phase change media is in contact with the exposed portion. The exposed portion is only a small percentage of an overall surface area of the composite electrode so that a contact footprint between the exposed portion and the phase change media is small relative to a surface area of the phase change media and Joule heat transfer from the phase change media into the composite electrode is reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.