Contractor, method for manufacturing the same, and probe card using the same
US6747465B2 · kind B2 · utility
14Cited by
5References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Nov 9, 2001 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Feb 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.