Piezoelectric thin film resonator and frequency variable resonator using the resonator
US6747529B2 · kind B2 · utility
14Cited by
13References
26Claims
0Family size
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Key dates
| Filing date | Sep 6, 2002 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Sep 6, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/175
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric thin film resonator which comprises a first electrode, a second electrode, and a piezoelectric film which is interposed between the first electrode and the second electrode, and formed of an epitaxial ferroelectric thin film containing barium titanate, a spontaneous polarization of the epitaxial ferroelectric thin film being uniaxially orientated in a direction normal to a film surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.