Fuse structure window
US6750753B2 · kind B2 · utility
5Cited by
16References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 10, 2003 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Mar 10, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention provides a fuse structure. The fuse structure comprises a substrate, a plurality of conductive layers, a dielectric layer and a plurality of conductive plugs. The fuse structure includes a plurality of fuse units, with increased the pitch between the fuse units. This structure prevents the fuse structure from failing when both misalignment of the laser beam or thermal scattering of the laser beam damage the second layer of the fuse structure in the laser blow process, which raises reliability and yield.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.