Electro-mechanical grating device having a continuously controllable diffraction efficiency
US6750998B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2001 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Sep 20, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1828
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electro-mechanical grating device including: a base having a surface; a bottom conductive layer provided above said base; a spacer layer is provided and a longitudinal channel is formed in said spacer layer, wherein said spacer layer defines an upper surface and the channel having a first and a second opposing side wall and a bottom; a plurality of spaced apart ribbon elements disposed parallel to each other and spanning the channel, said ribbon elements are fixed to the upper surface of the spacer layer on each side of the channel and each of the ribbon elements is provided with a conductive layer; a mechanical stop provided between the bottom conductive layer and the bottom of the channel wherein the mechanical stop forms a rigid barrier that is separated from a lower ribbon surface of the ribbon elements by a distance h0.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.