Reflective diffraction of radiation beams for image registration
US6751000B2 · kind B2 · utility
1Cited by
19References
20Claims
0Family size
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Key dates
| Filing date | Dec 5, 2002 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Dec 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70291
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In a method of registering an image on a substrate, the substrate is placed on a substrate support and a radiation beam is directed toward the substrate. The radiation beam is reflectively diffracted to modulate the intensity of the radiation beam. The modulated radiation beam is scanned across the substrate to register an image on the substrate. In one version, the radiation beam is a laser beam which is projected onto a mask blank to form a mask.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.