Assembly station for sputter shield assembly
US6751850B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2001 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Dec 10, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53961
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An assembly station for a sputter shield assembly provides a work bench for assembling and disassembling the sputter shield assembly. The shield assembly has a clamp shield facing downwards to hold the shield assembly which is turned over by 180 degrees, and includes at least three bottom rim support arms for supporting the clamp shield and bearing the weight of the shield assembly, and at least three inner rim retaining arms for contacting the inner rim formed by the shield and the clamp shield. The invention provides a changed support means for holding the shield assembly on the assembly station so that one person is enough to do the assembly and disassembly of the shield assembly, and thus save manpower and operation time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.