Rotation speed sensor

US6752017B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Rainer Willig · Tamm, DE
• Andreas Thomae · Kirchentellinsfurt, DE
• Burkhard Kuhlmann · Reutlingen, DE
• Joerg Hauer · Reutlingen, DE
• Udo-Martin Gomez · Leonberg, DE
• Siegbert Goetz · Gerlingen, DE
• Christian Doering · Stuttgart, DE
• Michael Fehrenbach · Rehoboth Beach, US
• Wolfram Bauer · Lörrach, DE
• Udo Bischof · Wannweil, DE
• Reinhard Neul · Stuttgart, DE
• Karsten Funk · Stuttgart, DE
• Markus Lutz · Palo Alto, US
• Gerhard Wucher · Reutlingen, DE
• Jochen Franz · Reutlingen, DE

Key dates

• Filing date: Mar 19, 2003
• Grant date: Jun 22, 2004
• Expiry date: Mar 19, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01C19/5747
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.