Semiconductor process recording apparatus
US6755933B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2002 |
| Grant date | Jun 29, 2004 |
| Priority date | — |
| Expiry date | Aug 17, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A semiconductor process recording apparatus comprises a buffer circuit and a endpoint recording device. The input terminal of the buffer circuit is connected to an external endpoint apparatus for receiving a first signal output from the endpoint apparatus. The output terminal of the buffer circuit is connected to the endpoint recording device for outputting a second signal representative of the first signal in response to the first signal. When receiving the second signal, the endpoint recording device outputs a feedback signal to the buffer circuit on the basis of the second signal. Because the feedback signal is blocked by the buffer circuit, the external endpoint apparatus is protected from the damage caused by the feedback signal, thereby greatly reducing the production cost and rate of semiconductor manufacturing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.