Method for making a microstructure by surface micromachining
US6756317B2 · kind B2 · utility
65Cited by
20References
76Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2001 |
| Grant date | Jun 29, 2004 |
| Priority date | — |
| Expiry date | Feb 8, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00547
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Various methods for forming surface micromachined microstructures are disclosed. One aspect relates to executing surface micromachining operation to structurally reinforce at least one structural layer in a microstructure. Another aspect relates to executing the surface micromachining operation to form a plurality of at least generally laterally extending etch release channels within a sacrificial material to facilitate the release of the corresponding microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.