Carbon nanobimorph actuator and sensor
US6756795B2 · kind B2 · utility
80Cited by
3References
39Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 18, 2002 |
| Grant date | Jun 29, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/725
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A nanomechanical actuator/oscillator device and system are provided. The nanomechanical actuator/oscillator device comprising nanobimorphs, such as nanotubes, designed such that inducing a difference in charge density between the tubes (e.g. by biasing one tube positive with respect to the other with sufficient tube-to-tube contact resistance) induces lateral movement in the end of the bimorph, forming a nanoscale resonator, as well as a force sensor when operated in an inverse mode. A method of producing a novel nanobimorph structure with integrated electrodes is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.