Delivery of dissolved ozone
US6758938B1 · kind B1 · utility
8Cited by
11References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2203/005
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus and method for delivering ozone to a workpiece. In one embodiment, fluid is sprayed onto a workpiece placed in an ozone-rich environment. Alternatively, ozone is mixed with the fluid prior to spraying the fluid onto the workpiece. When spraying the fluid, the invention pulses the fluid at desired rates to create a substantially uniform layer of ozone-rich fluid on the workpiece. In another embodiment, the workpiece is also slowly rotated during at least a portion of the time the layer of ozone-rich fluid is applied to the workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.