Apparatus and method for contacting device with delicate light-transparent pane
US6760223B2 · kind B2 · utility
2Cited by
8References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2002 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Oct 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/311
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A heat-sinking apparatus (62, 64, 66, and 68) containing a light-transparent pane (72) is configured in a way that enables the pane to be brought into contact with a device (40) such as a semiconductor device without significantly damaging the pane. A main spreader body (120) of a heat spreader (66) in the heat-sinking apparatus preferably consists largely of copper and is connected to the pane, preferably consisting largely of diamond, by way of a combination of metals that facilitates heat transfer from the pane to the heat spreader.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.