Electrical print resolution test die
US6762434B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 2003 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | Apr 23, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A test structure pattern includes a first comb, a second comb, and a serpentine line. The first comb includes a first set of tines of the same orientation. The second comb includes a second set of tines of the same orientation that are interdigitated with the first set of tines. The serpentine line runs between the interdigitated tines of the first metal comb and the second metal comb. The test structure pattern forms a first metal comb, a second metal comb, and a serpentine metal line on a die. Print quality and resolution is tested by checking for electrical continuity in the serpentine metal line and bridging between the serpentine metal line and one of the first metal comb and the second metal comb.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.