Combination type thin film magnetic head and method of manufacturing the same
US6762911B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 11, 2002 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | May 30, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49052
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
On a surface of a bottom pole, a write gap film and first magnetic material film having a high saturation magnetic flux density are formed, and the first magnetic material film is etched to remain a portion extending from an air bearing surface to a throat height zero reference position and a first non-magnetic film is formed in a removed portion. The first non-magnetic material film is polished to obtain a flat surface which is coplanar with a surface of the first magnetic material film. A second magnetic material film having a high saturation magnetic flux density is formed on the flat surface. The second magnetic material film, first magnetic material film, write gap film and bottom pole are partially removed by RIE using a mask formed on the flat surface in accordance with a given pattern to form a track pole having a double-layer structure consisting of bottom and to track poles and a trim structure in a self-aligned manner. A second non-magnetic material film is formed in a space formed by the etching, and a surface of the second non-magnetic material film is polished to have a flat coplanar surface with the top track pole. A thin film coil is formed on the flat surface, and …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.