Method and apparatus for proactive dispatch system to improve line balancing
US6763277B1 · kind B1 · utility
29Cited by
16References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 16, 2001 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | Nov 28, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method, apparatus, and system is provided for a proactive dispatch system to improve line balancing. At least one request for processing a semiconductor wafer is received. A line-balancing analysis based upon the request is performed. At least one semiconductor wafer based upon the line-balancing analysis is processed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.