Semiconductor testing apparatus for conducting conduction tests
US6765401B2 · kind B2 · utility
7Cited by
3References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 3, 2003 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Jan 3, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07314
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor testing apparatus for conducting a conduction test after stabilizing contact between probing pins and a wafer is provided. The semiconductor testing apparatus includes a heat transfer block which is contacted to the probing pins to adjust the temperature of the probing pins to a predetermined testing temperature before the probing pins are brought into contact with the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.