High power excimer or molecular fluorine laser system

US6768765B1 · kind B1 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Thomas Schroeder · Oettingen, DE
• Rustem Osmanow · Berlin, DE
• Juergen Baumler · Osterode, DE

Key dates

• Filing date: Jun 4, 2002
• Grant date: Jul 27, 2004
• Expiry date: Jun 4, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/105
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An excimer or molecular fluorine laser system includes a discharge tube filled with a gas mixture, multiple electrodes within the discharge tube and connected to a discharge circuit for energizing the gas mixture, a resonator for generating a laser beam, and at least one window structure including a first window and a second window. The first window initially seals the discharge tube and transmits the beam. The second window is initially unexposed to the gas mixture. The window structure is configured such that the second window is movable into position for sealing the discharge tube and transmitting the beam when the first window becomes contaminated.