Database interpolation method for optical measurement of diffractive microstructures
US6768967B2 · kind B2 · utility
65Cited by
25References
47Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2001 |
| Grant date | Jul 27, 2004 |
| Priority date | — |
| Expiry date | Oct 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A database interpolation method is used to rapidly calculate a predicted optical response characteristic of a diffractive microstructure as part of a real-time optical measurement process. The interpolated optical response is a continuous and (in a preferred embodiment) smooth function of measurement parameters, and it matches the theoretically-calculated optical response at the database-stored interpolation points.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.