System and method for real-time library generation of grating profiles
US6768983B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 28, 2000 |
| Grant date | Jul 27, 2004 |
| Priority date | — |
| Expiry date | Mar 16, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1847
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a method and a system for a real-time configurable definition and generation of grating profile libraries. A parameter set is used to specify the ranges of grating dimensions and resolutions of the profile library to be generated. In one embodiment, a compiler creates subsets of a large profile library, the subset designed to enable rapid search and validation of real-time data. In another embodiment, an automatic process generates a new parameter set and a new subset of the library when trigger conditions are met. Subsets of the profile library may be used to check if grating spectrum data are within the ranges established for an application and if the dimensions are within the process averages established for a manufacturing run. The system for generation of grating profile libraries is scalable, operable in a distributed environment, and includes application specific items that can be selected or determined by the client.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.