Interchangeable conditioning disk apparatus
US6769968B2 · kind B2 · utility
5Cited by
6References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | May 7, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B53/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A conditioning apparatus and method for conditioning a polish pad. The conditioning apparatus has a movable conditioning arm with a disk mounting apparatus, a plurality of interchangeable conditioning disks, a disk housing or multiple disk stations capable of holding the plurality of interchangeable conditioning disks and a controller for directing and controlling the movement of said conditioning arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.