Inventor · Newark, DE, US

Joseph So

18Patents
6h-index
32Co-inventors
66Inventor score

Filing activity: Aug 3, 2000 → Sep 11, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6749485B1 Hydrolytically stable grooved polishing pads for chemical mechanical planarization Emerging Cross-Sectional Technologies 72 Expired
US6736709B1 Grooved polishing pads for chemical mechanical planarization Performing Operations; Transporting 57 Expired
US6893328B2 Conductive polishing pad with anode and cathode Emerging Cross-Sectional Technologies 33 Expired
US7387964B2 Copper polishing cleaning solution Chemistry; Metallurgy 22 Expired
US6475069B1 Control of removal rates in CMP Performing Operations; Transporting 9 Expired
US6530824B2 Method and composition for polishing by CMP Electricity 6 Expired
US8257152B2 Silicate composite polishing pad Performing Operations; Transporting 5 Active
US6769968B2 Interchangeable conditioning disk apparatus Performing Operations; Transporting 5 Expired
US7303993B2 Chemical mechanical polishing compositions and methods relating thereto Electricity 5 Expired
US8202334B2 Method of forming silicate polishing pad Performing Operations; Transporting 4 Active
US7384871B2 Chemical mechanical polishing compositions and methods relating thereto Chemistry; Metallurgy 3 Expired
US7084059B2 CMP system for metal deposition Electricity 3 Expired
US11548114B1 Compressible non-reticulated polyurea polishing pad Electricity 1 Active
US9446498B1 Chemical mechanical polishing pad with window Performing Operations; Transporting 1 Active
US8357446B2 Hollow polymeric-silicate composite Emerging Cross-Sectional Technologies 0 Active
US11638978B2 Low-debris fluopolymer composite CMP polishing pad Electricity 0 Active
US11897082B2 Heterogeneous fluoropolymer mixture polishing pad Electricity 0 Active
US10875146B2 Debris-removal groove for CMP polishing pad Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.