Integrated chemical microreactor, thermally insulated from detection electrodes, and manufacturing and operating methods therefor
US6770471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2001 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Jul 12, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2300/1883
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Integrated microreactor, formed in a monolithic body and including a semiconductor material region and an insulating layer; a buried channel extending in the semiconductor material region; a first and a second access trench extending in the semiconductor material region and in the insulating layer, and in communication with the buried channel; a first and a second reservoir formed on top of the insulating layer and in communication with the first and the second access trench; a suspended diaphragm formed by the insulating layer, laterally to the buried channel; and a detection electrode, supported by the suspended diaphragm, above the insulating layer, and inside the second reservoir.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.