Inventor · Milano, IT

Flavio Francesco Villa

69Patents
15h-index
38Co-inventors
84Inventor score

Filing activity: May 27, 1998 → Apr 18, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6670257B1 Method for forming horizontal buried channels or cavities in wafers of monocrystalline semiconductor material Electricity 45 Expired
US7294536B2 Process for manufacturing an SOI wafer by annealing and oxidation of buried channels Emerging Cross-Sectional Technologies 29 Expired
US6376291B1 Process for manufacturing buried channels and cavities in semiconductor material wafers Performing Operations; Transporting 28 Expired
US7322236B2 Process for manufacturing a triaxial piezoresistive accelerometer and relative pressure-monitoring device Physics 28 Expired
US8173513B2 Method for manufacturing a semiconductor pressure sensor Physics 28 Active
US7763487B2 Integrated differential pressure sensor and manufacturing process thereof Physics 25 Active
US8499613B2 Integrated chemical sensor for detecting odorous matters Physics 24 Active
US7452713B2 Process for manufacturing a microfluidic device with buried channels Performing Operations; Transporting 24 Active
US6673593B2 Integrated device for microfluid thermoregulation, and manufacturing process thereof Emerging Cross-Sectional Technologies 22 Expired
US6277703A Method for manufacturing an SOI wafer Electricity 21 Expired
US6518147B1 Process for manufacturing an SOI wafer by oxidation of buried channels Electricity 18 Expired
US7678600B2 Process for manufacturing a membrane of semiconductor material integrated in, and electrically insulated from, a substrate Performing Operations; Transporting 18 Active
US6727479B2 Integrated device based upon semiconductor technology, in particular chemical microreactor Performing Operations; Transporting 16 Expired
US6770471B2 Integrated chemical microreactor, thermally insulated from detection electrodes, and manufacturing and operating methods therefor Performing Operations; Transporting 15 Expired
US6710311B2 Process for manufacturing integrated chemical microreactors of semiconductor material Performing Operations; Transporting 15 Expired
US6992367B2 Process for forming a buried cavity in a semiconductor material wafer and a buried cavity Performing Operations; Transporting 14 Expired
US6693039B2 Process for forming a buried cavity in a semiconductor material wafer and a buried cavity Performing Operations; Transporting 11 Expired
US9688531B2 Micro-electro-mechanical device having two buried cavities and manufacturing process thereof Performing Operations; Transporting 11 Active
US8008738B2 Integrated differential pressure sensor Physics 10 Active
US7071073B2 Process for manufacturing low-cost and high-quality SOI substrates Electricity 10 Expired
US6362070B1 Process for manufacturing a SOI wafer with buried oxide regions without cusps Electricity 10 Expired
US8448494B2 Integrated electronic microbalance plus chemical sensor Emerging Cross-Sectional Technologies 10 Active
US9180451B2 Fluidic cartridge for detecting chemicals in samples, in particular for performing biochemical analyses Emerging Cross-Sectional Technologies 10 Active
US7846811B2 Process for manufacturing a high-quality SOI wafer Electricity 9 Active
US9459186B2 Sample preparation and loading module Performing Operations; Transporting 8 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.