Patent · US Expired

Thermally enhanced flip chip packaging arrangement

US6770513B1 · kind B1 · utility

12Cited by
14References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 21, 2000
Grant dateAug 3, 2004
Priority date
Expiry dateJun 5, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/16152
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An improved arrangement for attaching a heat sink to a flip chip type die is disclosed. More specifically, the heat sink is attached to the back surface of the flip chip die by a metallic solder material. Such an arrangement provides a good thermal conductivity between the die and the heat sink. In some embodiments, the die is mounted on a grid array type substrate in a flip chip arrangement such that the die contacts are coupled to adjacent I/O pads on the substrate. In another aspect, one or more metallic intermediate die attach layers are deposited over the back surface of the die to form a solderable die surface. The heat sink is then attached to the solderable die surface. This approach works well when the chosen solder does not adhere well to the semiconductor die material. In one preferred implementation the intermediate metallic layers include a barrier layer that is deposited over the back surface of the die and a solderable metallic layer that is deposited over the barrier layer. In a method aspect, the barrier and metallic layers may be deposited on the back side of a wafer during fabrication which provides the desired structure after dicing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.