Method and apparatus for scanned instrument calibration
US6770867B2 · kind B2 · utility
6Cited by
14References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2002 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Jun 27, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for calibration of a scanned beam system are provided by sampling a calibration specimen containing an array of targets with a spacing between samples that is greater than the spacing between targets in the array and forming an image from the samples to reduce calibration specimen degradation and to magnify calibration errors to enable very fine calibration of the scanned beam system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.