Apparatus for supporting and manipulating a testhead in an automatic test equipment system
US6771062B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2003 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | May 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for supporting and manipulating a testhead for testing semiconductor devices includes a supporting frame, plates adapted to be mounted on opposite sides of the testhead and controllable shafts that connect the supporting frame to the plates. Each plate has an opening in which a flanged bearing is fitted. The testhead is mounted by moving the respective shafts through the flanged bearings within the openings of plates. In this manner, the shafts support the testhead on two fixed pivots. The shafts also provide a fixed axis of rotation about which the testhead can be rotated. The testhead can be locked in a particular position about the fixed rotation axis by a locking pin inserted into one of a plurality of locking holes surrounding the plate opening. A lever arm connected to the locking pin is utilized to change the radial position of the testhead. The testhead is dismounted by unlocking the locking pin and moving the shafts from the flanged bearings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.