Method and system for elevated temperature measurement with probes designed for room temperature measurement

US6771091B2 · kind B2 · utility

Assignee

• Semiconductor Diagnostics, Inc. · US

Inventors

• Jacek Lagowski · Woburn, US
• Piotr Edelman · Tampa, US
• Frank Gossett · Sanford, US
• Nick Kochey · St. Petersburg, US
• Alexandre Savtchouk · Tampa, US

Key dates

• Filing date: Sep 24, 2002
• Grant date: Aug 3, 2004
• Expiry date: Dec 14, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K7/42
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Techniques for measuring a contact potential difference of a sample at an elevated temperature using a probe designed for room temperature measurement are disclosed. In such measurements, probe damage by excessive heating can be prevented without any probe modifications to include probe cooling. This can be achieved by minimizing the time the probe spends in close proximity to the heated sample. Furthermore, the effect of probe heating by the sample on the probe reading can be corrected by including an additional contact potential difference measurement of a reference plate kept at room temperature in the measurement cycle.