Patent · US Expired

Non-contact mobile charge measurement with leakage band-bending and dipole correction

US6771092B1 · kind B1 · utility

10Cited by

6References

1Claims

0Family size

Inventors

Min-Su Fung · Lagrangeville, US
Roger L. Verkuil · Poughkeepsie, US
Gregory S. Horner · Santa Clara, US
William Howland · Wexford, US

Key dates

Filing date	Nov 18, 2002
Grant date	Aug 3, 2004
Priority date	—
Expiry date	Nov 18, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/311
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Corona charges are used to bias a wafer to push down mobile charges and then pull them up during temperature cycles. Mobile charge is measured from the drops in the corona voltage due to the mobile charges. Corrections are made in the measurements for dipole potentials, leakage and silicon band-bending.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.