Surface inspecting apparatus
US6771364B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2002 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Aug 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection apparatus comprises: a light source section that emits a first luminous flux and a second luminous flux; an irradiation optical system that irradiates the first luminous flux and the second luminous flux on the surface of the film-coated inspection subject; a displacement section that relatively displaces the film-coated inspection subject and an irradiation luminous flux from the irradiation optical system; a light-receiving optical system that receives scattered light generated from the inspection subject on the film-coated inspection subject after irradiation of the first luminous flux from the irradiation optical system and scattered light generated from the inspection subject on the film-coated inspection subject after irradiation of the second luminous flux from the irradiation optical system; a first light-receiving section that transforms the scattered light of the first luminous flux received by the light-receiving optical system into a first light reception signal; a second light-receiving section that transforms the scattered light of the second luminous flux received by the light-receiving optical system into a second light reception signal; and a s…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.