Fast switching method for a micro-mirror device for optical switching applications
US6771851B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 19, 2001 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Jun 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/359
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fast method of switching optical signals using micro-mirror structures and control. The method selects an optical path for a micro-mirror device, the mirror device being coupled to a torsion bar device. The micro-mirror device is moved or pivoted about a torsion bar device, the micro-mirror device being operated about the torsion bar device through an operating range. The micro-mirror device is subjected to a mechanical force from the torsion bar and being subjected an electro-static force applied to the micro-mirror device. The method positions the micro-mirror device to a selected switching location within the operating range a selected region within a predetermined time. The micro-mirror device is controlled during a portion of time during the moving by receiving position signals periodically at a predetermined frequency from a sensing device coupled to the micro-mirror device. The position signals are indicative of a position of the operating range and selectively applying an electrostatic force based upon one or more of the position signals such that the micro-mirror device is moved to the selected switching location without substantial oscillation of the micro-mirror device…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.