Patent · US Expired

Fast switching method for a micro-mirror device for optical switching applications

US6771851B1 · kind B1 · utility

13Cited by
70References
21Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 19, 2001
Grant dateAug 3, 2004
Priority date
Expiry dateJun 15, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/359
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A fast method of switching optical signals using micro-mirror structures and control. The method selects an optical path for a micro-mirror device, the mirror device being coupled to a torsion bar device. The micro-mirror device is moved or pivoted about a torsion bar device, the micro-mirror device being operated about the torsion bar device through an operating range. The micro-mirror device is subjected to a mechanical force from the torsion bar and being subjected an electro-static force applied to the micro-mirror device. The method positions the micro-mirror device to a selected switching location within the operating range a selected region within a predetermined time. The micro-mirror device is controlled during a portion of time during the moving by receiving position signals periodically at a predetermined frequency from a sensing device coupled to the micro-mirror device. The position signals are indicative of a position of the operating range and selectively applying an electrostatic force based upon one or more of the position signals such that the micro-mirror device is moved to the selected switching location without substantial oscillation of the micro-mirror device…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.