Xiao Yang
63Patents
12h-index
15Co-inventors
81Inventor score
Filing activity: Jun 19, 2001 → Apr 26, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7184195B2 | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator | Performing Operations; Transporting | 59 | Expired |
| US8227285B1 | Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes | Electricity | 37 | Active |
| US6992810B2 | High fill ratio reflective spatial light modulator with hidden hinge | Physics | 37 | Expired |
| US7034984B2 | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge | Emerging Cross-Sectional Technologies | 34 | Expired |
| US7068417B2 | Method and apparatus for a reflective spatial light modulator with a flexible pedestal | Physics | 27 | Expired |
| US7498715B2 | Method and structure for an out-of plane compliant micro actuator | Electricity | 23 | Active |
| US8704238B2 | Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes | Performing Operations; Transporting | 16 | Active |
| US8506529B1 | Method and structure of monolithetically integrated microneedle biochip | Human Necessities | 16 | Active |
| US8071398B1 | Method and structure of monolithically integrated IC-MEMS oscillator using IC foundry-compatible processes | Performing Operations; Transporting | 16 | Active |
| US8227911B1 | Method and structure of wafer level encapsulation of integrated circuits with cavity | Performing Operations; Transporting | 15 | Active |
| US8432005B2 | Method and structure of monolithetically integrated inertial sensor using IC foundry-compatible processes | Electricity | 14 | Active |
| US6771851B1 | Fast switching method for a micro-mirror device for optical switching applications | Physics | 13 | Expired |
| US7382513B2 | Spatial light modulator with multi-layer landing structures | Emerging Cross-Sectional Technologies | 11 | Active |
| US7022245B2 | Fabrication of a reflective spatial light modulator | Physics | 11 | Expired |
| US8742520B2 | Three axis magnetic sensor device and method | Electricity | 11 | Active |
| US7092140B2 | Architecture of a reflective spatial light modulator | Physics | 9 | Expired |
| US8936959B1 | Integrated rf MEMS, control systems and methods | Performing Operations; Transporting | 9 | Active |
| US7118234B2 | Reflective spatial light modulator | Emerging Cross-Sectional Technologies | 9 | Expired |
| US7928632B2 | Method and structure for an out-of-plane compliant micro actuator | Electricity | 9 | Active |
| US7608933B2 | Method and structure for kinetic energy based generator for portable electronic devices | Electricity | 8 | Active |
| US7142349B2 | Method and structure for reducing parasitic influences of deflection devices on spatial light modulators | Physics | 7 | Expired |
| US7245416B2 | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge | Emerging Cross-Sectional Technologies | 7 | Expired |
| US9150406B2 | Multi-axis integrated MEMS devices with CMOS circuits and method therefor | Electricity | 6 | Active |
| US8796790B2 | Method and structure of monolithetically integrated micromachined microphone using IC foundry-compatiable processes | Electricity | 6 | Active |
| US7172921B2 | Method and structure for forming an integrated spatial light modulator | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.