Analytical method for electron microscopy
US6774362B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 27, 2002 |
| Grant date | Aug 10, 2004 |
| Priority date | — |
| Expiry date | Sep 27, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
There is disclosed an analytical method capable of performing an analysis in electron microscopy by directing an electron beam at set analysis points wherein a reference image is displayed on a monitor and a user selects plural analysis points within the image. The specimen stage is returned to the approximate position where the reference image was obtained and a new image is obtained. At this time, the newly obtained image does not completely agree in position with the reference image due to accuracy of movement of the stage. The two images are supplied to a deviation amount calculator, which, in turn, compares the images and finds the amount of deviation of the newly obtained image from the reference image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.