Height scanning interferometry method and apparatus including phase gap analysis
US6775006B2 · kind B2 · utility
37Cited by
9References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 2, 2001 |
| Grant date | Aug 10, 2004 |
| Priority date | — |
| Expiry date | Jun 8, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analysis method for analyzing height-scanning interferometry data from a test surface, the method including: calculating a coherence profile and a phase profile for the test surface based on the data; calculating an experimental phase gap map based on a difference between the phase profile and the coherence profile; filtering the experimental phase gap map to remove noise; and using the filtered phase gap map to improve an estimate for a height profile of the test surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.