Patent · US Expired

Method and apparatus for user guidance in optical inspection and measurement of thin films and substrates, and software therefore

US6775583B2 · kind B2 · utility

2Cited by

4References

19Claims

0Family size

Assignee

Leica Microsystems Jena GmbH · DE

Inventors

Matthias Slodowski · Jena, DE
Karl-Heinz Irmer · Jena, DE

Key dates

Filing date	Jul 9, 2001
Grant date	Aug 10, 2004
Priority date	—
Expiry date	Oct 23, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method, apparatus, and software for guiding users during optical inspection and measurement of coated and noncoated substrates with an optical measurement system is provided. The optical measurement system incorporates an integrated recipe and data browser with sortable features to facilitate the optical inspection and measurement by the user.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.