Wafer container with minimal contact
US6776289B1 · kind B1 · utility
29Cited by
21References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 13, 2000 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Mar 13, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer carrier for transporting or holding wafers in a horizontal axially aligned arrangement has minimal four point regions of wafer support at the edge portion of the wafers. A preferred embodiment is an H-bar carrier with a plurality of slots defined by elongate wafer guides on the carrier sidewalls. Upwardly extended protrusions support the wafers with minimal contact with the carrier. The protrusions are sufficient in number and configuration to preclude contact with the top surface of the guides.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.