Valve/sensor assemblies

US6776567B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Brian Wayne Johnson · Muncie, US
• Edward Ng · Cambridge, US
• Justin Mauck · Belmont, US
• Edward R. Dykes · San Jose, US
• Joseph A. Kraus · Austin, US

Key dates

• Filing date: Apr 1, 2003
• Grant date: Aug 17, 2004
• Expiry date: Apr 1, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In a first aspect, a valve/sensor assembly is provided that includes a door assembly. The door assembly has (1) a first position adapted to seal an opening of a chamber; (2) a second position adapted to allow at least a blade of a substrate handler to extend through the opening of the chamber; and (3) a mounting mechanism adapted to couple the door assembly to the chamber. The valve/sensor assembly also includes a sensor system having a transmitter and a receiver adapted to detect a presence of a substrate and to communicate through at least a portion of the door assembly. Systems, methods and computer program products are provided in accordance with this and other aspects.