Method and structure for detection and measurement of electrical and mechanical resonance associated with an E-beam lithography tool
US6781141B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2002 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Oct 29, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
As disclosed herein, a system and method are provided for detection and measurement of noise on E beam tools and devices including a spectrum analyzer which looks at the different frequency components of the noise. The deflected electron beam from the tool is calibrated in a coarse and fine mode by scanning the beam over a grid-like calibration target. The position of where the bars are detected is compared to where they actually are, and the deflection can be calibrated so that it matches the grid. This invention can utilize a Fast Fourier Transform (FFT) of the time-ordered data which allows one to see peaks associated with noise.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.