Patent · US Expired

Modularized probe card with compressible electrical connection device

US6781392B1 · kind B1 · utility

7Cited by
6References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 12, 2003
Grant dateAug 24, 2004
Priority date
Expiry dateJun 14, 2023

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/07378
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A modularized probe card comprising an interface board, a probe head and at least a compressible electrical connection device is disclosed. The compressible electrical connection device comprises an insulation layer with a plurality of circuits on one of its surface. Two ends of each circuit connect respectively to the first contacting pad and the second contacting pad which combine with elastic contact members. Each elastic contact member has a supporter combining with a conductive layer for electrical connections by pushing and compressing. While a probe head is modularized installed on an interface board, the elastic contact members of the compressible electrical connection device is elastically contacted and compressed the probe head and the interface board to acquire modularized electrical connection of the probe card.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.