Resource consumption calculator
US6782343B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2001 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Mar 12, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B15/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A process tool controller of a semiconductor processing tool is provided with software that enables collecting, monitoring and logging information regarding the tool's consumption. Data is collected from the devices used for control of process conditions via the analog and digital inputs and outputs of the process tool controller. Consequently, the devices for controlling the process conditions have the additional function of measuring the tool's consumption. In this way the information regarding the tool's consumption is completely collected on board of the process tool. The parameters to be monitored and reported can be configured by the user, with use of a configuration editor, resulting in optimum flexibility of the system. In the illustrated embodiment, the user interface of the consumption monitoring and logging software is integrated into the user interface of the process control and monitoring software. The information regarding the tool's consumption can be communicated to a supervisor computer via a network.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.