Plasma processing container internal member and production method thereof
US6783863B2 · kind B2 · utility
51Cited by
1References
39Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Aug 3, 2001 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Aug 3, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24999
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.