Excimer or molecular laser with optimized spectral purity

US6785316B1 · kind B1 · utility

Assignee

• Lambda Physik AG · DE

Inventors

• Igor Bragin · Göttingen, DE
• Vadim Berger · Oebisfelde, DE
• Uwe Stamm · Göttingen, DE

Key dates

• Filing date: Aug 17, 2000
• Grant date: Aug 31, 2004
• Expiry date: Mar 30, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A final stage capacitance of a pulse compression circuit for an excimer or molecular fluorine lithography laser system is provided by a set of peaking capacitors connected through a first inductance to the electrodes and a set of sustaining capacitors connected to the electrodes through a second inductance substantially greater than the first inductance. Current pulses through the discharge are temporally extended relative to current pulses of a system having its final stage capacitance provided only by a set of peaking capacitors connected to the electrodes via the first inductance. An amplified spontaneous emission (ASE) level in the laser pulses is reduced thereby enhancing their spectral purity.