Method and system of dynamic learning through a regression-based library generation process
US6785638B2 · kind B2 · utility
166Cited by
15References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 6, 2001 |
| Grant date | Aug 31, 2004 |
| Priority date | — |
| Expiry date | Aug 14, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method and system for efficiently determining grating profiles using dynamic learning in a library generation process. The present invention also relates to a method and system for searching and matching trial grating profiles to determine shape, profile, and spectrum data information associated with an actual grating profile.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.