Electrode insulator materials for use in extreme ultraviolet electric discharge sources
US6787788B2 · kind B2 · utility
2Cited by
6References
27Claims
0Family size
Inventors
Key dates
| Filing date | Jan 21, 2003 |
| Grant date | Sep 7, 2004 |
| Priority date | — |
| Expiry date | Jan 27, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70033
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An insulator may be operable to electrically insulate a cathode from an anode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The insulator may be made of an aluminosilicate or a SiN/SiC material. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.