Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge

US6788763B1 · kind B1 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Willi Neff · Kelmis, BE
• Rainer Lebert · Kelmis, BE
• Klaus Bergmann · Heilbronn, DE
• Oliver Rosier · Jüchen, DE

Key dates

• Filing date: Aug 9, 2002
• Grant date: Sep 7, 2004
• Expiry date: Aug 26, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70033
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

The invention relates to a device for generating extreme ultraviolet and soft x-rays from a gas discharge, operated on the left-hand branch of the Paschen curve. There are two main electrodes, between which there is a gas-filled space, and each main electrode exhibits an opening, by means of which an axis of symmetry [(5)] is defined; and there are means to increase the conversion efficiency. Preferred fields of application are those requiring extreme ultraviolet (EUV) radiation or soft x-rays at a wavelength ranging from approximately 1 to 20 nm, and in particular around 13 nm, such as in EUV lithography.