Method of adhesion between an oxide layer and a metal layer
US6790476B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 21, 2002 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Mar 11, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/024
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of controlling the wetting characteristics and increasing the adhesion between a metal and an oxide layer. By introducing a negatively-charged species to the surface of an oxide layer, layer-by-layer growth of metal deposited onto the oxide surface is promoted, increasing the adhesion strength of the metal-oxide interface. The negatively-charged species can either be deposited onto the oxide surface or a compound can be deposited that dissociates on, or reacts with, the surface to form the negatively-charged species. The deposited metal adatoms can thereby bond laterally to the negatively-charged species as well as vertically to the oxide surface as well as react with the negatively charged species, be oxidized, and incorporated on or into the surface of the oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.