Patent · US Expired

Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool

US6791074B2 · kind B2 · utility

6Cited by

4References

29Claims

0Family size

Assignee

Infineon Technologies SC 300 GmbH & Co. KG · DE

Inventors

Sven Hahn · Dresden, DE
Michael Lering · Bubenreuth, DE
Mathias Schulz · Hüttenberg, DE

Key dates

Filing date	Jun 28, 2002
Grant date	Sep 14, 2004
Priority date	—
Expiry date	Sep 13, 2022

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF16P3/144
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.