Inventor · Bubenreuth, DE

Michael Lering

6Patents
2h-index
9Co-inventors
33Inventor score

Filing activity: Aug 17, 2000 → Mar 27, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6791074B2 Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool Mechanical Engineering; Lighting; Heating 6 Expired
US6389706B1 Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method Electricity 3 Expired
US6857841B2 Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool Emerging Cross-Sectional Technologies 2 Expired
US7054714B2 Installation for processing a semiconductor wafer and method for operating the installation Electricity 2 Expired
US6732855B1 Conveying element and conveyor means for conveying wafer receptacles, and method Performing Operations; Transporting 1 Expired
US6881914B2 Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.