Lithographic apparatus, device manufacturing method, and device manufacturing thereby
US6791664B2 · kind B2 · utility
9Cited by
7References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2002 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Apr 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Vibrational movement between the top of a lens and a main plate on which the lens is mounted is reduced by attaching between the lens and the main plate a lens support which detects relative movement between the lens and the main plates using piezoelectric sensors and compensates for that movement to reduce vibration using piezoelectric actuators which are in series with the piezoelectric sensors. The control signal which is generated to actuate the actuated piezoelectrics is generated by a controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.