Optical displacement-measuring apparatus
US6791699B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 6, 2001 |
| Grant date | Sep 14, 2004 |
| Priority date | — |
| Expiry date | Aug 7, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/347
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical displacement-measuring apparatus has a scale on which optical gratings are formed along a first axis and a second axis. It also has a sensor head arranged opposite to the scale and relatively movable along the first and second axes. The sensor head includes a photosensitive unit (3) for optically detecting a relative movement to provide a displacement signal. The photosensitive unit (3) includes a transparent substrate (30). A photosensitive device array (PDAy) is formed with a semiconductor film deposited on the substrate (30) and arrayed along the first axis at a certain pitch for providing a displacement signal corresponding to a displacement along the first axis. A photosensitive device array (PDAx) is formed with a semiconductor film deposited on the photosensitive device array (PDAy) sandwiching an insulator layer therebetween and arrayed along the second axis at a certain pitch for providing a displacement signal corresponding to a displacement along the second axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.